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Although plasma technologies are already being used extensively and there is great interest in introducing new ones, there are obstacles to innovation. These often lie in the fact that methods function within an empirically found parameter window, but the processes are not sufficiently understood to still function reliably when extrapolated to higher rates and speeds.
Targeted process analysis requires modern, complex measurement methods and special expertise. Expertise and knowledge of research and development at the forefront is also necessary to assess and further develop the potential of new plasma processes for specific applications.
Plasma Diagnostics and Analytics
- Spectroscopic methods of plasma and process diagnostics
- Optical emission spectroscopy
- Optical absorbtion spectroscopy
- Laser plasma diagnostics
- Microwave methods of plasma diagnostics
- Langmuir probes
Plasma Sources for Applications
- Radio-frequency plasma sources
- Capacitively coupled discharge
- Inductively coupled discharge
- Helicon discharge
- DC discharge
- Glow discharge
- Magnetron discharge
- Arc discharge
- Microwave discharge
Plasma Applications
- Surface technology
- Thin films
- Etching
- Thermal spraying
Educate, popularize, promote
- Teaching, coaching and guidance in the field of plasma applications.
- Increase the visibility of results and developments
- Promote advancements
- Blogging
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Sputter deposition
Understanding Planar Magnetron Discharge
The theoretical untroduction into the basic physics of a planar magnetron discharge.
Analytics
Fabry–Perot Interferometer - the tool for a high resolution spectroscopy
The Fabry–Perot Interferometer is considered as a tool for a high resolution plasma spectroscopy.
Sputter deposition
The Ionized Physical Vapor Deposition
The theoretical introduction to the Ionized Physical Vapor Deposition and its difference from conventional Physical Vapor Deposition.
Sputter deposition
Spectroscopic measurements of atomic temperature and velocity in vapor deposition systems
Some practical examples on the utilisation of the Fabry-Perot interferometer for plasma monitoring and control are considered.