Double Ring Magnetron Facility (Cluster 250)
Cluster 250 - Double Ring Magnetron facility for magnetron sputter deposition.
Magnetron sputter deposition process
Two targets of the Double Ring Magnetron
The Double Ring Magnetron contains two sputtering targets, thereby enabling homogeneous film on large size wafers.
Wafer preparation and analysis in a clean room
The first rough assessment of the film property right after a deposition.
X-ray diffraction analysis (XRD) of thin films
X-ray diffraction analysis is a technique used in materials science to determine the crystallographic structure of a material.
